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Spatial and temporal investigation of high power pulsed magnetron discharges by optical 2D-imaging (2010)

First Author: Liebig B

Attributed to: Dual Source Pulsed Plasmas for the Production of Ultra-High Performance Coatings funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2010.06.055

Publication URI: http://dx.doi.org/10.1016/j.tsf.2010.06.055

Type: Journal Article/Review

Parent Publication: Thin Solid Films

Issue: 5