📣 Try out the NEW Gateway to Research and let us know what you think.

We're looking for users to test the new service during August and September and share their feedback. Express your interest by completing this short form.

Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films. (2013)

First Author: Hees J

Attributed to: Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0957-4484/24/2/025601

PubMed Identifier: 23220817

Publication URI: http://europepmc.org/abstract/MED/23220817

Type: Journal Article/Review

Volume: 24

Parent Publication: Nanotechnology

Issue: 2

ISSN: 0957-4484