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ICP polishing of silicon for high-quality optical resonators on a chip (2012)

First Author: Laliotis A

Attributed to: Quantum Coherence: Joint Proposal for Optimising UK Research Capacity and Capability funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/22/12/125011

Publication URI: http://dx.doi.org/10.1088/0960-1317/22/12/125011

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 12