Proton exchange and diffusion in LiNbO3 using inductance coupled high density plasma (2007)

First Author: Ren Z

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.2746052

Publication URI: http://dx.doi.org/10.1116/1.2746052

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

Issue: 4