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Surface and thickness measurement of a transparent film using wavelength scanning interferometry. (2012)

First Author: Gao F

Attributed to: EPSRC Centre for Innovative Manufacturing in Advanced Metrology funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/oe.20.021450

PubMed Identifier: 23037266

Publication URI: http://europepmc.org/abstract/MED/23037266

Type: Journal Article/Review

Volume: 20

Parent Publication: Optics express

Issue: 19

ISSN: 1094-4087