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Fabrication of a novel SEM microgripper by electrochemical and FIB techniques (2010)

First Author: Briston K

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/20/1/015028

Publication URI: http://dx.doi.org/10.1088/0960-1317/20/1/015028

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 1