Light Actuated Microrobots
Lead Research Organisation:
Bangor University
Department Name: Sch of Computer Science & Electronic Eng
Abstract
Micron-scale robotics is a nascent and exciting area of research that is currently experiencing considerably increased attention by the robotics, microengineering and bioengineering communities. Historically, the creation and control of minute
biomimetic structures capable of tethered or untethered movement has been the subject of works of fiction, a prominent example being the 1966 film/novel Fantastic Voyage, in which a microscale submarine is launched into a patient's blood
circulation system in order to operate on a blood clot. Farfetched as this may have seemed at the time, the tremendous advances in microtechnology since that time have made the fabrication of swarms of such micro-structures on a single
semiconductor chip a reality. A major driving motivation behind this research is the creation of artificial entities on the same size scale as biological organisms. This will lead to the development of microscale tools for numerous applications in
experimental cell biology such as cell sorting, manipulation, surgery and targeted drug delivery. These tools are expected to be advantageous compared to standard pipetting techniques currently being used. In addition, such microrobots can be used to manipulate nearfield imaging devices (such as microlenses) for nanoscale microscopy and imaging. Another interesting application of microbots is for fabrication of 3D functional materials and tissue engineering.
Operating at such small dimensions (a few hundred microns and smaller) is extremely challenging and will require the development of unique manufacturing, sensing, actuation and control tools and paradigms specific to the micro-scale
robotics arena. A major challenge in all microrobotic devices is the delivery of actuation energy to the microrobot. While efficient power delivery to any microscale robot is no small feat, this is exacerbated if the microrobot is to operate in an
untethered manner. An effective approach for actuation of a microrobot is to use the energy of a light beam. Laser light has been used since the 1970s for mechanical control of small particles, for example in optical tweezers and optical traps. However, the energy of photons in a laser beam can also be utilised directly to create mechanical motion, with the potential for higher energy conversion efficiencies. This fellowship award will support the development of novel light-driven microrobots that will be able to walk on a flat surface and perform simple manipulation tasks at the microscale.
biomimetic structures capable of tethered or untethered movement has been the subject of works of fiction, a prominent example being the 1966 film/novel Fantastic Voyage, in which a microscale submarine is launched into a patient's blood
circulation system in order to operate on a blood clot. Farfetched as this may have seemed at the time, the tremendous advances in microtechnology since that time have made the fabrication of swarms of such micro-structures on a single
semiconductor chip a reality. A major driving motivation behind this research is the creation of artificial entities on the same size scale as biological organisms. This will lead to the development of microscale tools for numerous applications in
experimental cell biology such as cell sorting, manipulation, surgery and targeted drug delivery. These tools are expected to be advantageous compared to standard pipetting techniques currently being used. In addition, such microrobots can be used to manipulate nearfield imaging devices (such as microlenses) for nanoscale microscopy and imaging. Another interesting application of microbots is for fabrication of 3D functional materials and tissue engineering.
Operating at such small dimensions (a few hundred microns and smaller) is extremely challenging and will require the development of unique manufacturing, sensing, actuation and control tools and paradigms specific to the micro-scale
robotics arena. A major challenge in all microrobotic devices is the delivery of actuation energy to the microrobot. While efficient power delivery to any microscale robot is no small feat, this is exacerbated if the microrobot is to operate in an
untethered manner. An effective approach for actuation of a microrobot is to use the energy of a light beam. Laser light has been used since the 1970s for mechanical control of small particles, for example in optical tweezers and optical traps. However, the energy of photons in a laser beam can also be utilised directly to create mechanical motion, with the potential for higher energy conversion efficiencies. This fellowship award will support the development of novel light-driven microrobots that will be able to walk on a flat surface and perform simple manipulation tasks at the microscale.
Planned Impact
A summary of impact of this fellowship is as follows:
- Supporting the PI's research activities in robotics, microengineering and nano-optomechanics, thus enhancing the research profile of Bangor University in these areas.
- Enabling the PI to advance the training and teaching infrastructure at Bangor University in the above areas, thus enhancing the engineering programme of study at Bangor.
- Enabling the PI to connect and interact with industrial stakeholders for discussing research results and enabling the early adoption of this technology by these stakeholders, leading to the creation of local and national wealth.
- Aiding in the development of an innovative platform for actuation and control of microrobots. The platform developed in the project will offer new ways of inducing mechanical motion in microstructures using light. This will lead to the
development of new tools for research in nanotechnology and life sciences which will be used by national and international scientists and industries.
- These tools can be used to develop new clinical tools to improve healthcare at the societal level and also lead to advancements in other industries.
- Supporting the PI's research activities in robotics, microengineering and nano-optomechanics, thus enhancing the research profile of Bangor University in these areas.
- Enabling the PI to advance the training and teaching infrastructure at Bangor University in the above areas, thus enhancing the engineering programme of study at Bangor.
- Enabling the PI to connect and interact with industrial stakeholders for discussing research results and enabling the early adoption of this technology by these stakeholders, leading to the creation of local and national wealth.
- Aiding in the development of an innovative platform for actuation and control of microrobots. The platform developed in the project will offer new ways of inducing mechanical motion in microstructures using light. This will lead to the
development of new tools for research in nanotechnology and life sciences which will be used by national and international scientists and industries.
- These tools can be used to develop new clinical tools to improve healthcare at the societal level and also lead to advancements in other industries.
Organisations
- Bangor University (Lead Research Organisation)
- University of Lincoln (Collaboration)
- BANGOR UNIVERSITY (Collaboration)
- CARDIFF UNIVERSITY (Collaboration)
- Oxford Instruments (Collaboration)
- UNIVERSITY OF MANCHESTER (Collaboration)
- UNIVERSITY OF SOUTHAMPTON (Collaboration)
- UNIVERSITY OF EXETER (Collaboration)
Publications
Mashanovich G
(2020)
Mid-Infrared Suspended Group IV Photonics
Panduranga P
(2019)
Isotropic silicon etch characteristics in a purely inductively coupled SF6 plasma
in Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Panduranga Parashara
(2020)
Nanofabrication approaches for Group IV photonic MEMS devices
Rahmati A
(2021)
Suspended nanocrystalline diamond ridge waveguides designed for the mid-infrared
in Journal of Optics
| Description | The primary goal of the project is to use laser light to control the movement of microstructures, such as walking microrobots and microactuators. Alongside this, new techniques to use light for measuring motion and force at the nanoscale and conversely, using nanoscale motion to control light have been developed. Working in this area poses many challenges, due to the minute structures involved. This makes handling and manipulation of these devices very challenging. Using techniques from the microelectronics, nanomechanics and nanophotonics disciplines, a novel technology platform, spanning design, nanofabrication and testing, has been developed to realise the goals of the project. The microrobots and associated nanostructures have been fabricated in standard semiconductor platforms such as silicon and silicon nitride. The overarching finding of this work is that it is possible to realise sub-millimeter multilimbed microrobots whose movement can be controlled through the judicious application of laser light. At the same time, it is shown that by usuing the same material platform, nanostructured devices can be created to measure nanoscale forces through disturbances of the laser light field. The details of these findings are being written up as several journal papers, to be submitted before summer 2023. |
| Exploitation Route | This work has laid the groundwork for the development of more sophisticated light-controlled microrobotic devices and sensors, which will have applications in a myriad of different areas, such as microsurgery and navigation applications. |
| Sectors | Aerospace Defence and Marine Agriculture Food and Drink Digital/Communication/Information Technologies (including Software) Electronics Environment Healthcare Pharmaceuticals and Medical Biotechnology Transport |
| Description | I have presented these results in closed sessions to peers in the photonics and robotics areas, including audiences at the North of England Robotics Innovation Centre (NERIC) in Salford University. The results have prompted interest in the microrobotics field at NERIC, to the extent that I have been appointed as a Professor of Robotics there with the intention of advancing microrobotics in Salford and in the UK. The project has also resulted in an intellectual property case filed. We have recently been notified by the European Patent Office that the submitted patent has been approved. |
| First Year Of Impact | 2022 |
| Sector | Digital/Communication/Information Technologies (including Software),Electronics,Healthcare,Manufacturing, including Industrial Biotechology |
| Impact Types | Economic Policy & public services |
| Description | Development of new standard operating procedures, safety documents, practices for new materials and chemicals at the National Graphene Institute (where I carry out the fellowship nanofabrication). I was also personally asked by the manager of the NGI to provide feedback and suggestions in anticipation of their plans for the facility in the upcoming years, to which I responded. |
| Geographic Reach | National |
| Policy Influence Type | Influenced training of practitioners or researchers |
| Description | Redefining the hydrofluoric acid policies at the National Graphene Institute |
| Geographic Reach | Local/Municipal/Regional |
| Policy Influence Type | Influenced training of practitioners or researchers |
| Description | Mid-IR Diamond Integrated Photonics: A feasibility study (Future Photonics Hub -Innovation Partnership Fund) |
| Amount | £47,972 (GBP) |
| Funding ID | 515758410 |
| Organisation | Engineering and Physical Sciences Research Council (EPSRC) |
| Sector | Public |
| Country | United Kingdom |
| Start | 03/2020 |
| End | 08/2020 |
| Description | Nanofabrication consultancy for development of graphene-based photo-ionisation gas detectors |
| Amount | £20,000 (GBP) |
| Organisation | University of Manchester |
| Sector | Academic/University |
| Country | United Kingdom |
| Start | 12/2021 |
| End | 04/2023 |
| Title | 3D finite element models of grating assisted wavelength selective coupler |
| Description | Using finite element software and powerful workstation (multicore, large memory) we have developed 3D accurate finite element models of gratings assisted couplers which are key elements of both optical communications devices and opticallay actuated microrobots. |
| Type Of Material | Computer model/algorithm |
| Year Produced | 2020 |
| Provided To Others? | No |
| Impact | These will allow us to accurately design and predict device behaviour before fabrication. |
| Title | Development of thermo-optomechanical models of optically actuated microrobots |
| Description | To design microrobots with optimal energy usage and the capability of moving efficiently on a surface it is imperative to develop models that combine several physical domains, including structural mechanics, photonics and thermal effects. The models developed in this project to date have been informed by the tools and constraints imposed by available microfabrication methods. This work is ongoing but the models developed to date are showing great promise in terms of range of motion and power consumption. |
| Type Of Material | Computer model/algorithm |
| Year Produced | 2019 |
| Provided To Others? | No |
| Impact | These designs and simulations are informing the microfabrication processes needed to relaise the microrobots. |
| Title | On-chip Mach-Zehnder interferometers for wavelength division multplexing on suspended semiconductor membranes |
| Description | To realise the microrobotic structures, it is requred that the flow of light energy is guided on the surface of the chip. Wavelength multiplexing offers an elegant soltion for this. Precisely designed Mach-Zehnder interferometers are needed to implement these schemes. |
| Type Of Material | Computer model/algorithm |
| Year Produced | 2022 |
| Provided To Others? | No |
| Impact | Development of these MZI designs were crucial to the relaisation of the final microrobotic structures. |
| Description | Collaboration with Dr Stephen Boult on fabrication of Graphene Based Photoionisation detectors |
| Organisation | University of Manchester |
| Department | School of Earth and Environmental Sciences |
| Country | United Kingdom |
| Sector | Academic/University |
| PI Contribution | In this project there is a need to fabricate fragile micropatterned silicon nitride membranes for mounting graphene monolayers. Using the techniques developed during my fellowship I was able to fabricate these devices for Dr Boult's project. As is the case with multidisciplinary collaborations, working on this project also fed back into my fellowship project. I have taken the experience devloped in working with silicon nitride membranes and I am now developing microrobotic structures and microrobots using the silicon nitride material platform. Update, March 2023. The devices were successfully fabricated at the chip level and we have moved to wafer scale fabrication. A UKRI standard grant submission is being discussed. |
| Collaborator Contribution | Dr Stephen Boult is managing the project and providing the funds (an EPSRC IAA award) and came up with the original idea together with Dr Rakesh Kumar (UoM almunus) and an industry partner(Ionscience) |
| Impact | Work is onging but no papers generated yet. Several reports/presentations to the industrial partner (Ion Science) have been carried out. |
| Start Year | 2021 |
| Description | Collaboration with Lincoln University on tactile sensing |
| Organisation | University of Lincoln |
| Country | United Kingdom |
| Sector | Academic/University |
| PI Contribution | After meeting reserachers from Lincoln University at an H2020 Information evern t we have started discussions on new methods for tactile sensing. Our contribution is the fabrication of such devices. |
| Collaborator Contribution | Formulation of the technology requirements and the current state of the art. |
| Impact | We have looked at new ways of developing tactile sensing using electronics and photonics, howeer this is at a very early stage. |
| Start Year | 2019 |
| Description | Collaboration with Oxford Instruments Plasma Technology and Cardiff Diamond Foundry on characterising isotropic plasma etch of silicon, diamond and other materials |
| Organisation | Cardiff University |
| Department | School of Physics and Astronomy |
| Country | United Kingdom |
| Sector | Academic/University |
| PI Contribution | We are leading a study on the properties and characteristics of sulfur hexafluoride (SF6) inductively coupled plasma etching. The etching mechanism is isotropic and is of great interest in fabricating suspended microstructures, such as the microrobotic actuators that are the focus of this grant. Our contribution includes design of experiment, preparation of samples, running etching tests and taking the lead on publications. |
| Collaborator Contribution | We have partnered with the group of Prof. Oliver Williams at Cardiff university, who are providing us with diamond thin films and with engineers at Oxford Instruments Plasma Technology for their technical input in analysing and dissemination of the results. |
| Impact | We have generated process information for etch rates and etch resistance of various materials that are of importance in the semiconductor industry. These include silicon, silicon dioxide, silicon nitride, positive and negative photoresists and nanocrystalline diamond. The results are being written up in two journal papers with an anticipated submission date of March 2019. |
| Start Year | 2018 |
| Description | Collaboration with Oxford Instruments Plasma Technology and Cardiff Diamond Foundry on characterising isotropic plasma etch of silicon, diamond and other materials |
| Organisation | Oxford Instruments |
| Country | United Kingdom |
| Sector | Private |
| PI Contribution | We are leading a study on the properties and characteristics of sulfur hexafluoride (SF6) inductively coupled plasma etching. The etching mechanism is isotropic and is of great interest in fabricating suspended microstructures, such as the microrobotic actuators that are the focus of this grant. Our contribution includes design of experiment, preparation of samples, running etching tests and taking the lead on publications. |
| Collaborator Contribution | We have partnered with the group of Prof. Oliver Williams at Cardiff university, who are providing us with diamond thin films and with engineers at Oxford Instruments Plasma Technology for their technical input in analysing and dissemination of the results. |
| Impact | We have generated process information for etch rates and etch resistance of various materials that are of importance in the semiconductor industry. These include silicon, silicon dioxide, silicon nitride, positive and negative photoresists and nanocrystalline diamond. The results are being written up in two journal papers with an anticipated submission date of March 2019. |
| Start Year | 2018 |
| Description | Collaboration with Southampton University for nanomechanical testing of photonic structures |
| Organisation | University of Southampton |
| Department | Optoelectronics Research Centre |
| Country | United Kingdom |
| Sector | Academic/University |
| PI Contribution | The nano-opto-mechanical test setup built through my fellowship award is uniquely positioned to carry out nanomechanical tests on suspended photonic structures. Such structures are of great interest in mid- and far-infrared integarted photonics, since the suspended structures allow the use of air as a cladding, rather than oxides or polymers, thus resultsing in lower propagation losses. However the mechanical properties of such structures are not well-understood and experimental data on these are sparse, especially for newer materials such as diamond and germanium. We carried out measurements on these samples as our contribution to this collaboration. We also analysed the data and ran mechanical simulations, which agreed well with the experimental data. |
| Collaborator Contribution | The Southampton team fabricated the suspended silicon structures acorrding to their photonic designs and sent the samples to our lab in Bangor. They also participated in discussions regarding analysis of the results. Plans are under way to test other materials and toplogies. |
| Impact | A conference paper on these results has been submitted to the 19th International Symposium INFOTEH-JAHORINA, "Mid-Infrared Suspended Silicon and Germanium Photonics for Sensing Applications@, Mashanovich, Nezhad, et al. |
| Start Year | 2019 |
| Description | Collaboration with the DSP Centre of Excellence for development of photonic chip technology |
| Organisation | Bangor University |
| Department | DSP Centre of Excellence |
| Country | United Kingdom |
| Sector | Academic/University |
| PI Contribution | Our nano-optomechanical testing setup and the photonic design tools and fabrication techniques being developed under this fellowship have the potential to be also used for developing new solutions for optical communications, in particular in the area of silicon photonics. This is of interest to the DSP Centre of Excellence, a Centre funded by the Welsh Government. We are sharing our capabilities and exploring opportunities for collaborations in this area. |
| Collaborator Contribution | The DSP Centre funding application was led by academic and research staff at Bangor University. Being the first of its kind in the UK, the DSP Centre will be working with 18 industrial partners world-wide to develop innovative DSP solutions for 5G and 5G ecosystems to address strategic industrial challenges. Technically speaking, the DSP Centre will conduct the following six projects: • Project 1: DSP algorithm design and optimisation and implementation • Project 2: Flexible transceivers and networking devices • Project 3: Optical and wireless transmission system convergence • Project 4: Cloud network architecture • Project 5: SDN-based network control • Project 6: 5G testbed establishment and field trials. |
| Impact | Collaboration still in the initial phase |
| Start Year | 2019 |
| Description | EPSRC UK Metamaterials Network proposal |
| Organisation | University of Exeter |
| Country | United Kingdom |
| Sector | Academic/University |
| PI Contribution | Participated in discussions about the proposal and wrote a letter of support |
| Collaborator Contribution | A proposal led by Exeter University was submitted to EPSRC |
| Impact | None as yet. |
| Start Year | 2019 |
| Title | IMPROVEMENTS IN AND RELATING TO WAVEGUIDES |
| Description | An optical waveguide apparatus for guiding optical radiation therein, comprising a spring defining an optical grating structure with a grating period which is mechanically variable to control the Bloch-mode effective refractive index and/or optical path of at least a part of the optical waveguide in respect of a given frequency of guided optical radiation. |
| IP Reference | WO2019234416 |
| Protection | Patent application published |
| Year Protection Granted | 2019 |
| Licensed | No |
| Impact | Work is on-going for experimental demonstration of the concept. |
| Title | Chip scale custom built hydrofluoric vapor etch system |
| Description | Fabrication of the microrobots requires vapor etching of oxide, to create undercut structures. While vapor etch systems are commercially available, they are usually geared towards wafer scale processing. Also, some of them are designed to hold the chip upside down and create drafts of purging gases, which will result in losing the etched and released microrobots. We have built a custom hf vapor system that is suitable for chip scale processing and circumvents the processes mentioned above. |
| Type Of Technology | Systems, Materials & Instrumental Engineering |
| Year Produced | 2018 |
| Impact | We are now able to etch/release the microrobots in-house. In addition the HF facility creatd for this purpose is supporting related the research activities of colleagues at Bangor and also practical teaching of MEMS at the graduate level at Bangor. |
| Title | Development and characterisation of a recipe for isotropic silicon etching using SF6 plasma (shared with the users of the National Graphene Institute) |
| Description | Our work on silicon nanofabrication resulted in an in-depth characterisation of SF6 isotropic etch of silicon (see publications). This recipe has been added to the standard list of etch recipes at the National Graphene Institute and is being used by the students, postdocs and experiemental officers. |
| Type Of Technology | New/Improved Technique/Technology |
| Year Produced | 2019 |
| Impact | This recipe allows undercutting sensitive structures built upon a silicon substrates, including microrobots, nano-scale force measurement devices and suspended diamond structures. For example it laid the groundwork for our work on suspended diamond photonics, which then led to the recent award by the Future Photonics Hub. |
| Title | Micr-pneumatic system for manipulation of microrobotic structures |
| Description | Handling of microrobotic structures is extremely challenging due to the dominance of forces such as the Van der Waals over the robot's weight. A reliable technique to manipulate and pick and place these structures has been implemented and integrated into the testbed. |
| Type Of Technology | Systems, Materials & Instrumental Engineering |
| Year Produced | 2022 |
| Impact | This was the final piece needed to complete the photonic microrobotic testbed. Now, microrobots can be reliably manipulated through controlled pick and place operation. |
| Title | Microrobotic structure manipulation system |
| Description | Microrobotic structures are by definition extremely small. This poses problems when manipulation of these structures is needed, since forces such as the Van der Vaals force result in unwanted sticking to probes and manipulatiors (since the structures as as small as motes of dust, one cannot rely on gravity to counteract adhesion forces). I have developed a novel tool for manipulating thee microrobots and I have integrated this tool intomy existing nanophotonic/nanomechanical characterisation testbed. Is this research tool or method published or available to others? |
| Type Of Technology | Systems, Materials & Instrumental Engineering |
| Year Produced | 2022 |
| Impact | Without this tool it would have been difficult and and probably impossible to move forward with the project goals. |
| Title | Optical microrobotic testing platform |
| Description | To characterise and operate the optical microrobotic structures in this project a dedicated customised test setup is needed. The setup allows directing an infrared optical laser beam on to the microrobots, while monitoring the path of light on the microrobot. It also allows visualising and tracking of the microrobot position with digital imaging and capture from various angles. Another feature of this setup is the use of micro-grippers to manipulate the samples in 3D axes. In additio , the setup also incorporates a Femtotools nanoforce measurement probe system to characterise the cantilevered limbs of the microrobots in response to external light actuation. The combination of these capabilities is quite unique, even at the international scale. The setup is functional but we are constantly adding improvements and capabilities. |
| Type Of Technology | Systems, Materials & Instrumental Engineering |
| Year Produced | 2019 |
| Impact | This is allowing us to carry out in depth characterisation tests on our fabricated microrobots. Update March 2020: The system is now integrated with a tunable laser, digital vision and computer control stages, which allows testing of grating coupled devices, such as the microrobots. A customised software tool has been developed for the tuanable laser in coordination with the manufacturer (SANTEC). |
| Description | Attending the BORN (British Optomechanical Research Network) kickoff meeting |
| Form Of Engagement Activity | Participation in an activity, workshop or similar |
| Part Of Official Scheme? | No |
| Geographic Reach | National |
| Primary Audience | Professional Practitioners |
| Results and Impact | Dr Aly Abdou (postdoc on the grant) attending the British Optomechanical Research Network (BORN) kickoff meeting held on May 9 & 10, 2019 at the University of Nottingham. He also presented a poster describing the group's expertise and networked with several attendees for possible collaborations. |
| Year(s) Of Engagement Activity | 2019 |
| URL | https://bornkickoffmeeting.weebly.com/ |
| Description | Centre of Photonics Expertise launch event |
| Form Of Engagement Activity | Participation in an activity, workshop or similar |
| Part Of Official Scheme? | No |
| Geographic Reach | National |
| Primary Audience | Professional Practitioners |
| Results and Impact | The Centre for Photonics Expertise was launched in St Asaph on April 8, 2019. I provided an information slide on nanophotonic and nanooptomechanical testing capabilities in my lab, which was presented to attendees |
| Year(s) Of Engagement Activity | 2019 |
| URL | http://www.cpe-wales.org/ |
| Description | Cross college seminar on integrated photonics and nanomechanical testing |
| Form Of Engagement Activity | A talk or presentation |
| Part Of Official Scheme? | No |
| Geographic Reach | Local |
| Primary Audience | Professional Practitioners |
| Results and Impact | An online presentation describing my lab's capabilities and research activities enabled by this EPSRC fellowship in the fields of nanophotonics, nanomechanics and microrobotics. |
| Year(s) Of Engagement Activity | 2020 |
| Description | Demonstration of the nano-optomechanical test setup to postgraduate students at Bangor |
| Form Of Engagement Activity | A talk or presentation |
| Part Of Official Scheme? | No |
| Geographic Reach | Local |
| Primary Audience | Postgraduate students |
| Results and Impact | In the RF and Optical MEMS module that I teach at Bangor Universiy I carried out a remote demonstration of the test setup built under this fellowship in my lab. The presentation was live using Teamviewer. During the demonstration students were able to experience various aspects of this measurement system and connect it to material learnt throughout the semester. At least one student expressed an interest to do a postgraduate project on this topic. |
| Year(s) Of Engagement Activity | 2020 |
| Description | Hands-on experience of working with a free space optical interferometer |
| Form Of Engagement Activity | A talk or presentation |
| Part Of Official Scheme? | No |
| Geographic Reach | Local |
| Primary Audience | Undergraduate students |
| Results and Impact | Using the imapct funds from this fellowship I built a self-contained Mach-Zehnder interferometer on an optical breadboard using a Helium Neon laser. The interferometer was transported to the lecture hall and demonstrated. Afterwards the students were allowed hands-on work with the interferoemeter which gave them a good idea of the sensitivity and utility of this tool. The students expressed satisfaction at having had this experience. |
| Year(s) Of Engagement Activity | 2019 |
| Description | Leadership role in the nanofabrication and reliabity analysis theme of the North Wales Growth Bid and the Bangor Univeristy Science Campus expansion |
| Form Of Engagement Activity | A formal working group, expert panel or dialogue |
| Part Of Official Scheme? | No |
| Geographic Reach | Local |
| Primary Audience | Professional Practitioners |
| Results and Impact | As Director of Research at the School of Electronics I have primary leadership role in the nanofabrication and reliabity analysis theme of the North Wales Growth Bid and the Bangor Univeristy Science Campus expansion. In this role I am involved with planning activities to expand Bangor's infrastructre for nanofabrication, microelectonis and nanophotonics. I have particpated in several meetings with university and external stakeholders in this capacity. The successful capture of my EPSRC fellowship has been instrumental in placing me in this role at Bangor University. |
| Year(s) Of Engagement Activity | 2020 |
| Description | National Silicon Photonics & Lithography Centre - Statement of Need |
| Form Of Engagement Activity | A formal working group, expert panel or dialogue |
| Part Of Official Scheme? | No |
| Geographic Reach | National |
| Primary Audience | Professional Practitioners |
| Results and Impact | I was selected as a 'Silicon Photonics Champion' to help prepare the community Statement of Need for the National Silicon Photonics & Lithography Centre for the NRF bid led by Southampton University to EPSRC. During this online videopresence event I was asked to assist with running the workgroups and preparation of the bid, in particular the 'Justification' section of the document. |
| Year(s) Of Engagement Activity | 2020 |
| URL | https://drive.google.com/file/d/1cX1PzNBfRWfwvDgJUu7_z-gmhdZP_tH-/view |
| Description | Online interview (text) conducted by the Welsh Government Engineering National Research Network on the awarded fellowship |
| Form Of Engagement Activity | A press release, press conference or response to a media enquiry/interview |
| Part Of Official Scheme? | No |
| Geographic Reach | National |
| Primary Audience | Public/other audiences |
| Results and Impact | I was contacted by the NRN for an interview about the award, the process of obtaining it and the basic ideas behind the project, with the general public audience as a target. |
| Year(s) Of Engagement Activity | 2018 |
| URL | http://www.ernw.ac.uk/en/news-and-events.htm?id=84 |
| Description | Participation in the Statement of Need for renewal of the National Epitaxy Facility |
| Form Of Engagement Activity | A formal working group, expert panel or dialogue |
| Part Of Official Scheme? | No |
| Geographic Reach | National |
| Primary Audience | Professional Practitioners |
| Results and Impact | I participated in the workgroups for preparation of the Statement of Need for renewal of the National Epitaxy Facility. |
| Year(s) Of Engagement Activity | 2020 |
| URL | https://www.eventbrite.co.uk/e/epitaxy-statement-of-need-community-consultation-9th-october-2020-tic... |
| Description | Presentation to Bangor University's new VC on activities in the College of Environmental Studies |
| Form Of Engagement Activity | A talk or presentation |
| Part Of Official Scheme? | No |
| Geographic Reach | Local |
| Primary Audience | Professional Practitioners |
| Results and Impact | The Dean of the College presented a selection of research activities at our College. One of these was about the research on Microrobots in which a scanning electron microscope image of a microrobot built by myself under this fellowship was displayed. |
| Year(s) Of Engagement Activity | 2020 |
| Description | Press release by Bangor University announcing the fellowship award |
| Form Of Engagement Activity | A press release, press conference or response to a media enquiry/interview |
| Part Of Official Scheme? | No |
| Geographic Reach | Regional |
| Primary Audience | Public/other audiences |
| Results and Impact | A news release by Bangor University announcing the awarding of this fellowship and describing the project for a general audience. The title of the release is :"Shining a light on robot technology - Dr Maziar Nezhad wins sought after EPSRC Fellowship to develop micro-robots powered by light " |
| Year(s) Of Engagement Activity | 2018 |
| URL | https://www.bangor.ac.uk/computer-science-and-electronic-engineering/news/shining-a-light-on-robot-t... |
| Description | SIOE panel |
| Form Of Engagement Activity | A formal working group, expert panel or dialogue |
| Part Of Official Scheme? | No |
| Geographic Reach | International |
| Primary Audience | Professional Practitioners |
| Results and Impact | Panel on photonic integration |
| Year(s) Of Engagement Activity | 2019 |