Film Bulk Acoustic Resonator-based Ultra-Sensitive Biosensor Array Using Low Cost Piezoelectric Polymer as the Active Material
Lead Research Organisation:
University of Cambridge
Department Name: Engineering
Abstract
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Publications
Fu Y
(2010)
Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review
in Sensors and Actuators B: Chemical
Fu Y
(2017)
Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
in Progress in Materials Science
Fu YQ
(2012)
Microfluidics based on ZnO/nanocrystalline diamond surface acoustic wave devices.
in Biomicrofluidics
Garcia-Gancedo L
(2012)
Experimental comparison of FBARs and SMRs responsitivities to mass loadings
García-Gancedo L
(2011)
AlN-based BAW resonators with CNT electrodes for gravimetric biosensing
in Sensors and Actuators B: Chemical
García-Gancedo L
(2011)
ZnO-based FBAR resonators with carbon nanotube electrodes.
in IEEE transactions on ultrasonics, ferroelectrics, and frequency control
García-Gancedo L
(2013)
Direct comparison of the gravimetric responsivities of ZnO-based FBARs and SMRs
in Sensors and Actuators B: Chemical
García-Gancedo L
(2012)
Room-temperature remote-plasma sputtering of c -axis oriented zinc oxide thin films
in Journal of Applied Physics
García-Gancedo L
(2012)
Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading.
in Biosensors & bioelectronics
He X
(2012)
Film bulk acoustic resonator pressure sensor with self temperature reference
in Journal of Micromechanics and Microengineering
| Description | The overall aim of the proposed project was to develop an integrated biosensor array for disease detection and illness diagnosis. The project was divided into four sub-goals: (1) to develop a technology to fabricate a highly sensitive FBAR sensor which can be used as an universal sensing technology platform employing special bio-binding systems and chemical absorption layers; (2) to develop a technology to fabricate low cost, high performance FBAR devices using a PE polymer on a glass substrate; (3) develop a biorecognition system based-on peptide aptamers which has specific binding ability with prostate-antigens, immobilization of biomolecules on the device surface and biodetection. (4) to characterize the device performance and to verify its biodetection functionality using specific biochemical systems. To realize these goals, the project has achieved a number of measurable objectives: 1. To optimize device structure and dimensions to obtain the best FBAR device performance. Models have been established which enable simulation of the device performance taking into account of the influence of the electrode and active layer thicknesses, material quality, surface roughness and attached biological species. (Objective unchanged and completed) 2. To optimize the deposition of ZnO thin films for FBAR devices. Particular attention was paid to the requirement for detection in liquid, meaning that a TSM FBAR is needed with off c-axis crystal orientation. In practice, the deposition of offaxis material was not achieved. However, by using a novel HiTUS sputtering deposition technology for the ZnO, a far better on-axis alignment of ZnO crystals was achieved which has led to devices being fabricated with a world-leading quality (Q) factor (~2000). 3. To develop a technology to process high quality PE polymer thin films. The technology addressed the issues of thin film formation, adhesion with the substrate, patterning, etching, poling to obtain the piezoelectric properties, and the excessive damping on the "soft" substrates. Such devices were successfully manufactured and measured. The Q-factor of these devices was, as expected, lower than that of the devices made with ZnO. Also, as the quality of the ZnO was far better than expected (see objective #2) the focus of the project was shifted to concentrate more on the ZnO material. 4. To develop high sensitivity FBAR sensors using ZnO and PE polymers as the active layer with operation frequencies up to 2 GHz. A technology was developed to fabricate biosensor arrays. (Objective unchanged and completed). 5. To develop a bio-recognition system which has a strong binding affinity and specificity with ability to retain biological identities when bound with probe molecules. To develop a technology to deposit bio-probe molecules on the device surface and a method to interrogate them to bind with target molecules for detection. (Objective unchanged and completed). 6. To characterize the FBAR device with PE ceramic and polymer thin films, and to develop a method to quantify the target molecules bound with the probe molecules. And to develop a method for multi-channel parallel detection. In practice, biological measurements were not made with the PE polymer as the ZnO devices were of significantly better quality than expected. 7. To develop a technology for replacing metal electrodes on FBAR devices with carbon nanotube electrodes. This was a new objective, which was completed successfully. The new devices show significantly improved performance due to the reduced mass of the CNT electrodes (compared with metal) and the suppression of surface travelling waves, resulting in enhanced Q-factor. We were the first group worldwide to propose, realise and publish such CNT electrode-based devices. Overall, the result of this work has been that we lead the field in high sensitivity FBAR devices with a mass detection limit of ~1E-15g (approximately the mass of a single virus). |
| Exploitation Route | The results are being used by a diversity of industries with a requirement for physical or biological sensing. The University of Cambridge is licensing the IP associated with this project to a new spin-out, Sorex Sensors Ltd. |
| Sectors | Agriculture, Food and Drink,Chemicals,Electronics,Environment,Healthcare |
| Description | The results of this project havce been used to significantly advcance the use of film bulk acoustic resonator devices for a range of sensing applications, including in the biological sensing and physical sensing fields. It has resulted in sevela follow-on projects and collaborations with a number of industry partners. It has also resulted in a patent application that has been filed in Europe, the USA and Korea |
| First Year Of Impact | 2012 |
| Sector | Chemicals,Electronics,Healthcare |
| Impact Types | Economic |
| Description | Cancer Research UK Cambridge Centre Early Detection 2015 |
| Amount | £61,656 (GBP) |
| Organisation | Cambridge Cancer Centre |
| Sector | Academic/University |
| Country | United Kingdom |
| Start | 04/2016 |
| End | 10/2017 |
| Description | EPSRC |
| Amount | £22,065 (GBP) |
| Funding ID | Cambridge University Knowledge Transfer - Pathways to I |
| Organisation | Engineering and Physical Sciences Research Council (EPSRC) |
| Sector | Public |
| Country | United Kingdom |
| Start | 01/2012 |
| End | 06/2012 |
| Description | European Commission Research Directorate |
| Amount | £490,015 (GBP) |
| Funding ID | CP-IP 246334-2 |
| Organisation | European Commission |
| Department | Directorate General for Research and Innovation |
| Sector | Public |
| Country | European Union (EU) |
| Start | 10/2010 |
| End | 09/2014 |
| Description | H2020 - H2020-SPIRE-2014 |
| Amount | € 888,270 (EUR) |
| Funding ID | 636820 |
| Organisation | European Commission |
| Department | Horizon 2020 |
| Sector | Public |
| Country | European Union (EU) |
| Start | 01/2015 |
| End | 12/2017 |
| Description | Knowledge Transfer Partnership |
| Amount | £101,539 (GBP) |
| Funding ID | KTP010131 |
| Organisation | Innovate UK |
| Sector | Public |
| Country | United Kingdom |
| Start | 05/2016 |
| End | 04/2018 |
| Company Name | Sorex Sensors Limited |
| Description | Sorex Sensors Limited aim to commercialise film bulk acoustic resonator technology for gravimetric sensing applications. |
| Year Established | 2017 |
| Impact | None as yet. |
| Website | http://sorexsensors.com/ |