Nanoscale characterisation of nitride semiconductor thin films using EBSD, ECCI, CL and EBIC

Lead Research Organisation: University of Oxford
Department Name: Materials

Abstract

Abstracts are not currently available in GtR for all funded research. This is normally because the abstract was not required at the time of proposal submission, but may be because it included sensitive information such as personal details.

Publications

10 25 50

publication icon
Vilalta-Clemente A (2015) Analysis of Dislocation Densities using High Resolution Electron Backscatter Diffraction in Microscopy and Microanalysis

publication icon
Trager-Cowan C (2014) Electron Channeling Contrast Imaging of Defects in III-Nitride Semiconductors in Microscopy and Microanalysis

publication icon
Vilalta-Clemente A (2015) High-Resolution Electron Backscatter Diffraction in III-Nitride Semiconductors in Microscopy and Microanalysis

publication icon
Britton T (2016) Tutorial: Crystal orientations and EBSD - Or which way is up? in Materials Characterization

 
Description We have used electron backscatter diffraction (EBSD) to measure the variation in lattice rotations and strains in II-V nitride thin films grown in various collaborators labs.
In combination with electron channelling contrast imaging a methodology has been developed to allow quantification and separation of threading dislocation densities for screw edge and mixed defect types. This can be performed on the top surface of as grown structures removing the need for thin foil production and TEM observation and so allowing information to be provided to growers in a more quickly.

Advances have also be made toward use of simulated EBSD patterns as reference patterns. Methods for interpolating intensity distributions calculated in a full dynamical diffraction simulations to allow matching to experimental patterns at lower computational cost have been explored. As have new routes for calibrating the pattern centre and camera length.
Exploitation Route EBSD method is providing useful materials characterisation information that is being feedback to materials growers.
There is clearly scope for the method to be taken up for characterisation of other systems. SiC for power electronics being perhaps the most obvious target.

The advances made in understanding and improving the sensitivity of the method has impact on wider application of the method for example we have been able to take on new applications where the dislocation density is relatively low including Si for solar photovoltaics, and deformation of upper mantle rocks (NERC funding)
Sectors Aerospace, Defence and Marine,Electronics,Energy,Environment,Manufacturing, including Industrial Biotechology

URL https://omg.web.ox.ac.uk/
 
Description Better understanding of EBSD strain mapping method and visibility of the technique has improved both the quality and up-take of commercial products (hardware and software). Feedback of materials characterisation results has allowed growers to better understand materials being produced.
First Year Of Impact 2014
Sector Aerospace, Defence and Marine,Electronics,Energy,Environment,Other
Impact Types Economic

 
Description NERC Award
Amount £483,386 (GBP)
Funding ID NE/M000966/1 
Organisation Natural Environment Research Council 
Sector Public
Country United Kingdom
Start 01/2015 
End 01/2018
 
Description Platform Grant - Characterisation
Amount £1,094,904 (GBP)
Funding ID EP/K032518/1 
Organisation Engineering and Physical Sciences Research Council (EPSRC) 
Sector Public
Country United Kingdom
Start 06/2013 
End 05/2018
 
Description Earth Science 
Organisation University of Oxford
Department Department of Earth Sciences
Country United Kingdom 
Sector Academic/University 
PI Contribution We are transferring methodologies developed in Materials Science for EBSD mapping of lattice strain and dislocation densities to natural and synthetic minerals of interest to Earth Sciences.
Collaborator Contribution Identification of key Earth Science problems to which the methodology could be applied. In particular upper mantle rocks have been targeted as an initial application and a series of olivine samples have been worked on. Initial results were very promising and lead to a successful NERC funding application. The project is now fully active and funded and is likely to grow over the next few years.
Impact Multi-disciplinary collaboration involving transfer of methodologies from Materials Science to Earth Science Outputs to date have been conference presentations (no proceedings with ISSN) though two papers are currently under review
Start Year 2014