EPI2SEM: EPItaxial growth and in-situ analysis of 2-dimensional SEMiconductors

Lead Research Organisation: University of Nottingham
Department Name: Sch of Physics & Astronomy

Abstract

The progressive miniaturization of materials and devices in the 21st century has enabled important discoveries and access to a wide range of phenomena of fundamental and applied interest. But future progress and innovative solutions to global challenges require a shift towards transformative material systems and integration technologies. Here we propose to establish at the University of Nottingham a facility (EPI2SEM) for the EPItaxial growth and in-situ analysis of a new generation of 2-dimensional SEMiconductors based on metal chalcogenides. Their unique electronic properties (tuneable band structure, IR-VIS-UV broad optical absorption, electron correlations, high electron mobility, etc.) and versatility for a wide range of applications (digital flexible electronics, optoelectronics, quantum technologies, energy, etc.) have attracted a surge of interest worldwide. However, for these new materials to meet academia and industry needs, several challenges must be addressed, including their controlled scalable growth, investigation by advanced techniques, and integration in complex device architectures.

EPI2SEM will provide the UK community with a unique capability for the development of semiconductors grown with atomic layer precision in a clean ultra high vacuum system with fully-characterised electronic, chemical and morphological properties for advances across several research disciplines. EPI2SEM will enable the transformative miniaturization and functionalization of semiconductors for advances in condensed matter (quantum materials), manufacturing (new processes and designs), quantum technologies (security, sensing, communication), nanotechnologies (low-energy consumption, diversification, integration), surface physics (sensing, catalysis, energy conversion). Progress in these areas is key to the health of several research disciplines (engineering, medicine, chemistry, biology, etc.) contributing towards prosperity outcomes.

The future competitiveness of the UK economy relies on innovation in science; ability to respond timely to global changes/challenges through innovation in infrastructure; the availability of highly-skilled and trained scientists and technologists; and flexibility to exploit novel technologies and materials to deliver better quality of life. This proposal has the potential to deliver innovation across these areas, addressing several challenges facing society. In particular, EPI2SEM will contribute to address the EPSRC priority of "21st Century Materials". In 2013, David Willetts announced the Eight Great Technologies that will propel the UK to future growth. This includes "Advanced Materials and Nanotechnology" that led to the establishment of the Henry Royce Institute (NGI) and the National Graphene Institute (NGI). One of the research pillars of the HRI/NGI is "2D Materials", but methods for their manufacturing need to be developed. The new equipment will set out the key steps needed to reach a long-term vision and benefit strategically important research areas, as set out in the 2018 government industrial strategy White paper.

Planned Impact

EPI2SEM will enable the transformative miniaturization and functionalization of semiconductors for advances in condensed matter (quantum materials), manufacturing (new processes and designs), quantum technologies (security, sensing, communication), nanotechnologies (low-energy consumption, diversification, integration), surface physics (sensing, catalysis, energy conversion). Progress in these areas is key to the health of several research disciplines (engineering, medicine, chemistry, biology, etc.) contributing towards prosperity outcomes.
The future competitiveness of the UK economy relies on innovation in science; ability to respond timely to global changes/challenges through innovation in infrastructure; the availability of highly-skilled and trained scientists and technologists; and flexibility to exploit novel technologies and materials to deliver better quality of life. This proposal has the potential to deliver innovation across these areas, addressing several challenges facing society.

Our strategy is a sustainable research infrastructure that will help the UK to respond to challenges in science, industry and society.
We will actively pursue pathways to impact of the equipment by:
- Maximizing its usage to support new science and kick-start innovative research projects
Although EPI2SEM will be used mainly by condensed-matter scientists, an increasing use can also be expected by researchers in other disciplines, such as chemistry and engineering. This potential will be further developed through an active and targeted dissemination strategy towards new communities, supported by preferential access for 'first-time users', pump priming projects, and the adaptation of instrumentation to specific needs.

- Bridging the gap with industry to strengthen the socio-economic impact
The proposed facility will push the frontiers of modern technologies by stimulating innovation across different sectors. To realize this potential we will actively attracting industrial users by offering novel, optimized services, targeted outreach activities and a dedicated industrial access procedure through a dedicated industrial liaisons officer. The University of Nottingham is committed to supporting the long-term industrial and economic impact of EPI2SEM through the Technology Transfer and IP Commercialisation team, which will facilitate the translation and commercial exploitation of scientific discoveries emerging from the research enabled by EPI2SEM.

- Strengthening the role of the facility worldwide
As the cost and complexity of facilities continues to increase, there is a growing awareness that collaboration is essential to remain competitive on a global scale. We will promote network activities on the development and production of materials and devices. We will define and defend a global position on the future of condensed matter research towards national and international policy makers and funding agencies through a pro-active targeted outreach strategy. We have established partnerships with several world-leading groups and provided materials for research on 2D semiconductors to over 30 groups, including 7 UK institutions.


The Operation and Steering Groups of EPI2SEM will ensure the delivery of these three main targets through measures to capture impact by key performance indicators (KPIs), i.e. by monitoring research outputs, number of users, patents, research contracts, etc. In particular, effective dissemination (e.g. by press releases, flyers, brochures, web-site, publication, exhibitions) is pivotal to success and long-term sustainability. Thus the impact of all communication activities will be monitored and adjustments made to increase impact whenever they are deemed to be insufficient.

Publications

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Shiffa M (2023) Wafer-Scale Two-Dimensional Semiconductors for Deep UV Sensing. in Small (Weinheim an der Bergstrasse, Germany)

 
Description Researchers in the Schools of Physics and Astronomy at the University of Nottingham have completed the installation in Dec. 2021 of a new facility (EPI2SEM) for the EPItaxial growth and in-situ analysis of two-dimensional (2d) SEMiconductors. The EPI2SEM facility is supported by Nottingham and an EPSRC Strategic Equipment Award. It will provide the UK and international community with a unique capability for the transformative miniaturization and functionalization of semiconductors, supporting a wide-ranging programme of fundamental science and application-driven research.

EPI2SEM is a bespoke facility in Ultra-High Vacuum (UHV). It consists of a chamber for the synthesis of atomically thin 2d semiconductors by molecular beam epitaxy (MBE), a second chamber for band structure and chemical analysis by electron spectroscopy (nanoESCA), and a third chamber for morphological studies by scanning probe microscopy (SPM). All modules are interconnected in UHV by a linear transfer line (LTL), providing integrated sample transfer between growth and analysis chambers without contamination of the grown materials. 2d semiconductors with controlled layer thickness, composition and interfaces will provide a platform to reveal a rich variety of new quantum phenomena for science and technologies. These hold promise to revolutionize different sectors ranging from communication to computing and security towards a second quantum revolution.
Exploitation Route EPI2SEM will provide the UK with a unique research capability for growth and in situ studies of 2D semiconductors and heterostructures. There is a competitive UK community (e.g. in Bath, Cambridge, Exeter, Oxford, Sheffield, Lancaster, Herriot-Watt, Warwick, Imperial College London, St Andrews, NPL, HRI, etc.) working on different aspects of research on 2D materials, from advanced methods for their growth to fundamental and applied studies. Our team has engaged before successfully with the national and international community for research on 2D semiconductors (over 30 groups, including 7 UK institutions) and is participating actively in international consortia, such as the EU Graphene Flagship and the EMFL.
To aid visibility, the new equipment will be listed on the regional (Midlands Innovation) national equipment.data.ac.uk catalogue. By drawing on collective experience and networks, we will enhance opportunities to deliver innovation in science and technology. There will be measures in place to engage with the UK community and ensure balance of usage within and outside the institution to maximize outcomes. We envisage that the number of external users will gradually grow over time after the initial installation and development.
Sectors Education,Electronics,Energy,Manufacturing, including Industrial Biotechology,Security and Diplomacy

URL https://www.dropbox.com/s/2uc4wkmhpypp5xq/Amalia%20Patan%C3%A9%20v10%20%2B%20SUBS%20%2B%20LOGOS.mp4?dl=0
 
Description The successful use of the EPI2SEM facility has led to two new projects with the Defence Science and Technology Laboratory for the development and use of new two-dimensional semiconductors in UV-C sensors .
Sector Electronics
Impact Types Cultural

 
Description EPSRC Industrial CASE (ICASE)
Amount £118,562 (GBP)
Funding ID Voucher Award 220003 
Organisation Defence Science & Technology Laboratory (DSTL) 
Sector Public
Country United Kingdom
Start 10/2022 
End 09/2026
 
Description Feasibility Study into Novel Concepts for a UV Communications System
Amount £98,000 (GBP)
Funding ID PA2260 
Organisation Defence Science & Technology Laboratory (DSTL) 
Sector Public
Country United Kingdom
Start 07/2022 
End 02/2023
 
Description Improving the sustainability of the European Magnetic Field Laboratory 
Organisation European Magnetic Field Laboratory
Country Belgium 
Sector Academic/University 
PI Contribution Prof. Amalia Patanè has joined 18 European partners in the European Union award ISABEL "Improving the sustainability of the European Magnetic Field Laboratory". High magnetic fields are one of the most powerful tools available to scientists for the study, modification and control of states of matter. The European Magnetic Field Laboratory (EMFL) represents all high-field infrastructures in Europe and constitutes a distributed research infrastructure of global impact and importance. Within ISABEL, Nottingham will contribute to strengthen the role of high magnetic field research in Europe and the UK membership of the EMFL on behalf of the EPSRC (https://gow.epsrc.ukri.org/NGBOViewGrant.aspx?GrantRef=NS/A000060/1).
Collaborator Contribution High magnetic fields are one of the most powerful tools available to scientists for the study, modification and control of states of matter. The European Magnetic Field Laboratory (EMFL) represents all high-field infrastructures in Europe and constitutes a distributed research infrastructure of global impact and importance.
Impact Physics, Chemistry, Biophysics and Engineering
Start Year 2020
 
Description Partnership with the Institute of Semiconductors (Chinese Academy of Sciences) 
Organisation Chinese Academy of Sciences
Country China 
Sector Public 
PI Contribution Exchange of samples, joint experiments and PhD students.
Collaborator Contribution Exchange of samples, joint experiments and PhD students.
Impact - Joint publications (listed with other outputs) - International Fellowship awarded to Prof. Patane (6 months visit) - Honorary professorship to Prof. Patane - Joint 4-year PhD program: University of Nottingham and Institute of Semiconductors (CAS)
Start Year 2018
 
Description Partnerships with members of the EU Graphene Flagship (Horizon 2020) 
Organisation National Physical Laboratory
Department Environmental Measurement Group
Country United Kingdom 
Sector Academic/University 
PI Contribution Our research on metal chalcogenide van der Waals crystals initiated new research activities and received funding within Horizon 2020. Collaborations include work on device fabrication and quantum transport in InSe, and magnetic force microscopy studies of magnetic InSe with the University of Manchester, ETH-Zurich and the National Physical Laboratory (UK). Nottingham provided materials to these partners and took part in all discussions/paper writing.
Collaborator Contribution The University of Manchester and ETH-Zurich provided device fabrication and experimental transport studies of InSe. The NPL assisted with the magnetic force microscopy studies of magnetic InSe.
Impact The collaboration has led to joint publications, as listed in the list of publications.
Start Year 2015
 
Description Partnerships with members of the EU Graphene Flagship (Horizon 2020) 
Organisation University of Manchester
Department Cancer Research UK Manchester Institute
Country United Kingdom 
Sector Academic/University 
PI Contribution Our research on metal chalcogenide van der Waals crystals initiated new research activities and received funding within Horizon 2020. Collaborations include work on device fabrication and quantum transport in InSe, and magnetic force microscopy studies of magnetic InSe with the University of Manchester, ETH-Zurich and the National Physical Laboratory (UK). Nottingham provided materials to these partners and took part in all discussions/paper writing.
Collaborator Contribution The University of Manchester and ETH-Zurich provided device fabrication and experimental transport studies of InSe. The NPL assisted with the magnetic force microscopy studies of magnetic InSe.
Impact The collaboration has led to joint publications, as listed in the list of publications.
Start Year 2015
 
Description Partnerships with members of the EU Graphene Flagship (Horizon 2020) 
Organisation University of Zurich
Department Neurology Department Zurich
Country Switzerland 
Sector Academic/University 
PI Contribution Our research on metal chalcogenide van der Waals crystals initiated new research activities and received funding within Horizon 2020. Collaborations include work on device fabrication and quantum transport in InSe, and magnetic force microscopy studies of magnetic InSe with the University of Manchester, ETH-Zurich and the National Physical Laboratory (UK). Nottingham provided materials to these partners and took part in all discussions/paper writing.
Collaborator Contribution The University of Manchester and ETH-Zurich provided device fabrication and experimental transport studies of InSe. The NPL assisted with the magnetic force microscopy studies of magnetic InSe.
Impact The collaboration has led to joint publications, as listed in the list of publications.
Start Year 2015
 
Description Animation of EPI2SEM 
Form Of Engagement Activity Engagement focused website, blog or social media channel
Part Of Official Scheme? No
Geographic Reach International
Primary Audience Other audiences
Results and Impact The animation of the new EPI2SEM facility has reached > 10000 people.
Year(s) Of Engagement Activity 2022,2023
URL https://www.dropbox.com/s/2uc4wkmhpypp5xq/Amalia%20Patan%C3%A9%20v10%20%2B%20SUBS%20%2B%20LOGOS.mp4?...