Gallium Nitride Smart Power Integrated Circuit Technology (GaN SPICe)
Lead Research Organisation:
University of Glasgow
Abstract
Abstracts are not currently available in GtR for all funded research. This is normally because the abstract was not required at the time of proposal submission, but may be because it included sensitive information such as personal details.
Organisations
People |
ORCID iD |
| David Moran (Principal Investigator) | |
| Chong Li (Co-Investigator) |
Publications
Crawford K
(2022)
High synergy atomic layer etching of AlGaN/GaN with HBr and Ar
in Journal of Vacuum Science & Technology A