Resolution limits of secondary electron dopant contrast in helium ion and scanning electron microscopy. (2011)


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Bibliographic Information

Digital Object Identifier:

PubMed Identifier: 21745435

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Type: Journal Article/Review

Volume: 17

Parent Publication: Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada

Issue: 4

ISSN: 1431-9276