Accurate calibration for the quantification of the Al content in AlGaN epitaxial layers by energy-dispersive X-ray spectroscopy in a Transmission Electron Microscope (2011)

First Author: Amari H
Attributed to:  Nitrides for the 21st century funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1742-6596/326/1/012028

Publication URI: http://dx.doi.org/10.1088/1742-6596/326/1/012028

Type: Journal Article/Review

Parent Publication: Journal of Physics: Conference Series