Illustration of the industrial readiness of hot wire chemical vapor deposition (HWCVD) as part of standard micro-fabrication and high spec nanofabrication production lines (2014)

First Author: A. Tarazona
Attributed to:  Silicon Photonics for Future Systems funded by EPSRC


No abstract provided

Bibliographic Information

Type: Conference/Paper/Proceeding/Abstract

Parent Publication: 8th Hot-wire (Cat) Chemical Vapor Deposition Conference