Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging (2012)

First Author: Song X
Attributed to:  New Dimensions of Engineering Science at Large Facilities funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2011.10.211

Publication URI: http://dx.doi.org/10.1016/j.tsf.2011.10.211

Type: Journal Article/Review

Parent Publication: Thin Solid Films

Issue: 6