Stress evaluation in thin films: Micro-focus synchrotron X-ray diffraction combined with focused ion beam patterning for do evaluation (2013)

First Author: Baimpas N
Attributed to:  New Dimensions of Engineering Science at Large Facilities funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2013.07.019

Publication URI: http://dx.doi.org/10.1016/j.tsf.2013.07.019

Type: Journal Article/Review

Parent Publication: Thin Solid Films