The role of helium ion microscopy in the characterisation of complex three-dimensional nanostructures. (2010)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.ultramic.2010.04.009
PubMed Identifier: 20452124
Publication URI: http://europepmc.org/abstract/MED/20452124
Type: Journal Article/Review
Volume: 110
Parent Publication: Ultramicroscopy
Issue: 9
ISSN: 0304-3991