Monolithic MEMS vacuum valves for miniature chemical preconcentrators (2009)

First Author: Baker C

Attributed to: Platform Support for 3D Electrical MEMS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/sensor.2009.5285700

Publication URI: http://dx.doi.org/10.1109/sensor.2009.5285700

Type: Conference/Paper/Proceeding/Abstract

ISBN: 978-1-4244-4190-7