Ion beam assisted crystallization of amorphous silicon layers using high current density Gallium beams (2012)

First Author: England J
Attributed to:  University of Surrey Ion Beam Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.nimb.2011.01.111

Publication URI: http://dx.doi.org/10.1016/j.nimb.2011.01.111

Type: Journal Article/Review

Parent Publication: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms