Direct observation of indium precipitates in silicon following high dose ion implantation (2013)

First Author: Dudeck K

Attributed to: University of Surrey Ion Beam Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0268-1242/28/12/125012

Publication URI: http://dx.doi.org/10.1088/0268-1242/28/12/125012

Type: Journal Article/Review

Parent Publication: Semiconductor Science and Technology

Issue: 12