4FEDF8E0-3055-4F5D-9C27-C9E8F2699886University of Surrey Ion Beam CentreResearch GrantEP/D032210/1798CB33D-C79E-4578-83F2-72606407192CEPSRCINCOME_ACTUAL2271580DCF13BC5-3671-4622-BB67-1A90F66B071CHigh accuracy traceable Rutherford backscattering spectrometry of ion implanted samplesAnal. Methods965ec28a126275dad623e9b5a67db0bbColaux J2014-01-01http://dx.doi.org/10.1039/c3ay41398ehttp://dx.doi.org/10.1039/c3ay41398e1Journal Article/Review545f963a0ea053.38418106