4FEDF8E0-3055-4F5D-9C27-C9E8F2699886University of Surrey Ion Beam CentreResearch GrantEP/D032210/1798CB33D-C79E-4578-83F2-72606407192CEPSRCINCOME_ACTUAL22715800AD60D81-3656-4F19-965A-70EA10FA56F1Reduction of phosphorus diffusion in germanium by fluorine implantationJournal of Applied Physicsdd4a9d22f6186ba7c0ec5ece68fb79c7El Mubarek H2013-01-01http://dx.doi.org/10.1063/1.4847555http://dx.doi.org/10.1063/1.484755522Journal Article/Review545f994314dcb4.05749489