Helium ion microscopy and energy selective scanning electron microscopy - two advanced microscopy techniques with complementary applications (2014)

First Author: Rodenburg C

Attributed to: Quantitative, high resolution two-and-three dimensional dopant mapping in the Scanning Electron Microscope by Secondary Electron Spectro-Micro funded by EPSRC

No abstract provided

Type: Journal Article/Review

Parent Publication: Journal of Physics: Conference Series