A hybrid photonics based sensor for surface measurement (2014)

First Author: Martin H
Attributed to:  A chip device for on-line assessment in nano-scale surface manufacture funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.cirp.2014.03.046

Publication URI: http://dx.doi.org/10.1016/j.cirp.2014.03.046

Type: Journal Article/Review

Parent Publication: CIRP Annals

Issue: 1

ISSN: 0007-8506