Thermal Stability of Neodymium Aluminates High- ? Dielectric Deposited by Liquid Injection MOCVD Using Single-Source Heterometallic Alkoxide Precursors (2012)

First Author: Taechakumput P
Attributed to:  Liquid injection ALD of Cp- based precursors for deposition of dielectric materials funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1155/2012/891079

Publication URI: http://dx.doi.org/10.1155/2012/891079

Type: Journal Article/Review

Parent Publication: Journal of Nanomaterials