A review of micro-contact physics for microelectromechanical systems (MEMS) metal contact switches (2013)

First Author: Toler B

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/23/10/103001

Publication URI: http://dx.doi.org/10.1088/0960-1317/23/10/103001

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 10

ISSN: 0960-1317