03F00611-C83C-4AEF-8FF6-30F7C7E41E00An Innovative Electronics Manufacturing Research CentreResearch GrantEP/H03014X/1798CB33D-C79E-4578-83F2-72606407192CEPSRCINCOME_ACTUAL908880804EE5E70-B20A-4CFB-B602-B336447C6DB3Test structures for electrical evaluation of high aspect ratio TSV arrays fabricated using planarised sacrificial photoresistca9160bf6dd51002847633fe9ab0846fR Zhang2013-01-01Conference/Paper/Proceeding/Abstract56cdcb70cb9134.98794976