4EBFE83E-B1FB-4A73-B065-5936285C80ECUK Silicon PhotonicsResearch GrantEP/F001428/2798CB33D-C79E-4578-83F2-72606407192CEPSRCINCOME_ACTUAL806545928C4BC2-2B69-4452-BFD2-E8EE195F3D3BModulator integration in high-performance BiCMOS371aa84dfec967117a2bcc2de81ad1c7L. Zimmermann2013-01-01Conference/Paper/Proceeding/Abstract56def8ec2cc976.94045687