Impact of discrete dopants in ultra-scale finfets and the effect of XC on dopant clustering (2015)

First Author: Martinez A

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/iwce.2015.7301974

Publication URI: http://dx.doi.org/10.1109/iwce.2015.7301974

Type: Conference/Paper/Proceeding/Abstract