Development of InSb dry etch for mid-IR applications (2016)

First Author: Pusino V
Attributed to:  UK Quantum Technology Hub in Quantum Enhanced Imaging funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2015.12.014

Publication URI: http://dx.doi.org/10.1016/j.mee.2015.12.014

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering