Electron dynamics and frequency coupling in a radio-frequency capacitively biased planar coil inductively coupled plasma system (2015)

First Author: Zaka-Ul-Islam M

Attributed to: Queen's University Belfast Plasma Physics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0963-0252/24/4/044007

Publication URI: http://dx.doi.org/10.1088/0963-0252/24/4/044007

Type: Journal Article/Review

Parent Publication: Plasma Sources Science and Technology

Issue: 4