Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas (2016)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.4947453
Publication URI: http://dx.doi.org/10.1063/1.4947453
Type: Journal Article/Review
Parent Publication: Journal of Applied Physics
Issue: 16