Photochemical atomic layer deposition and etching (2016)

First Author: Chalker P
Attributed to:  Mechanisms and Control of Resistive Switching in Dielectrics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.surfcoat.2016.02.046

Publication URI: http://dx.doi.org/10.1016/j.surfcoat.2016.02.046

Type: Journal Article/Review

Parent Publication: Surface and Coatings Technology