Study of the effect of RF-power and process pressure on the morphology of copper and titanium sputtered by ICIS (2017)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.surfcoat.2016.10.018
Publication URI: http://dx.doi.org/10.1016/j.surfcoat.2016.10.018
Type: Journal Article/Review
Parent Publication: Surface and Coatings Technology