348CBD50-9DB7-4FB9-8036-29545E789F49Silicon Photonics for Future SystemsResearch GrantEP/L00044X/1798CB33D-C79E-4578-83F2-72606407192CEPSRCINCOME_ACTUAL6009330B9E0088C-DD1A-44C9-BE96-6B2361FD9650Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applicationsJournal of Physics D: Applied Physicsb0ec0052b4a962a799b1f2ef0de877b9DomÃnguez Bucio T2017-01-01http://dx.doi.org/10.1088/1361-6463/50/2/025106http://dx.doi.org/10.1088/1361-6463/50/2/0251062Journal Article/Review58ad6b59765f26.66744606