8C44E346-93E9-4F0E-8DB4-702C8908B272Miniature Flexible & Reconfigurable Manufacturing System for 3D Micro-productsResearch GrantEP/K018345/1798CB33D-C79E-4578-83F2-72606407192CEPSRCINCOME_ACTUAL2109986CDEEF43F-72E4-493C-977A-98E085F5B618Optical Interferometrya8e49ffed5fb0d02ad5f6ec5fce26614Gao F2017-01-01http://dx.doi.org/10.5772/66530978-953-51-2955-4http://dx.doi.org/10.5772/66530Interferometry for Online/In-Process Surface InspectionBook Chapter58b54b7c16a996.79797904