4FEDF8E0-3055-4F5D-9C27-C9E8F2699886University of Surrey Ion Beam CentreResearch GrantEP/D032210/1798CB33D-C79E-4578-83F2-72606407192CEPSRCINCOME_ACTUAL2271580313E3CA5-8304-4986-8320-2C4019A05953Implantation and Diffusion of Silicon Marker Layers in In0.53Ga0.47AsJournal of Electronic Materialsa3cdee47e1f86d4692a93f96376290b4Aldridge H2016-01-01http://dx.doi.org/10.1007/s11664-016-4616-0http://dx.doi.org/10.1007/s11664-016-4616-08Journal Article/Review58b959311d03e6.93123041