Post-fabrication phase trimming of Mach-Zehnder interferometers by laser annealing of germanium implanted waveguides (2017)

First Author: Chen X

Attributed to: Silicon Photonics for Future Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/prj.5.000578

Publication URI: http://dx.doi.org/10.1364/prj.5.000578

Type: Journal Article/Review

Parent Publication: Photonics Research

Issue: 6