Low-Cost Microfabrication for MEMS Switches and Varactors (2018)

First Author: Obuh I

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/tcpmt.2018.2834865

Publication URI: http://dx.doi.org/10.1109/tcpmt.2018.2834865

Type: Journal Article/Review

Parent Publication: IEEE Transactions on Components, Packaging and Manufacturing Technology

Issue: 9