Nanoscale structural damage due to focused ion beam milling of silicon with Ga ions (2018)

First Author: Salvati E
Attributed to:  New Dimensions of Engineering Science at Large Facilities funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.matlet.2017.11.043

Publication URI: http://dx.doi.org/10.1016/j.matlet.2017.11.043

Type: Journal Article/Review

Parent Publication: Materials Letters

ISSN: 0167-577X