Multiscale Analyses of Surface Failure Mechanism of Single-Crystal Silicon during Micro-Milling Process. (2017)

First Author: Bai J

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.3390/ma10121424

PubMed Identifier: 29236086

Publication URI: http://europepmc.org/abstract/MED/29236086

Type: Journal Article/Review

Volume: 10

Parent Publication: Materials (Basel, Switzerland)

Issue: 12

ISSN: 1996-1944