Identification of oxide defects in semiconductor devices: A systematic approach linking DFT to rate equations and experimental evidence (2018)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.microrel.2017.12.021

Publication URI: http://dx.doi.org/10.1016/j.microrel.2017.12.021

Type: Journal Article/Review

Parent Publication: Microelectronics Reliability