Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devices. (2018)

First Author: Chen B
Attributed to:  University of Southampton - Equipment Account funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/oe.26.024953

PubMed Identifier: 30469603

Publication URI: http://europepmc.org/abstract/MED/30469603

Type: Journal Article/Review

Volume: 26

Parent Publication: Optics express

Issue: 19

ISSN: 1094-4087