Silicon slot fin waveguide on bonded double-SOI for a low-power accumulation modulator fabricated by an anisotropic wet etching technique (2018)

First Author: Byers J

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/OE.26.033180

PubMed Identifier: 30645474

Publication URI: http://europepmc.org/abstract/MED/30645474

Type: Journal Article/Review

Parent Publication: Optics Express

Issue: 25

ISSN: 1094-4087