Hot-wire chemical vapor deposition low-loss hydrogenated amorphous silicon waveguides for silicon photonic devices (2019)

First Author: Oo S
Attributed to:  Silicon Photonics for Future Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/prj.7.000193

Publication URI: http://dx.doi.org/10.1364/prj.7.000193

Type: Journal Article/Review

Parent Publication: Photonics Research

Issue: 2