Low-Temperature NH3-Free Silicon Nitride Platforms for Integrated Photonics (2018)
Attributed to:
CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/group4.2018.8478748
Publication URI: http://dx.doi.org/10.1109/group4.2018.8478748
Type: Conference/Paper/Proceeding/Abstract