Atomic layer deposition of functional multicomponent oxides (2019)

First Author: Coll M

Attributed to: Precision Manufacturing of Flexible CMOS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.5113656

Publication URI: http://dx.doi.org/10.1063/1.5113656

Type: Journal Article/Review

Parent Publication: APL Materials

Issue: 11