Polydimethylsiloxane as polymeric protective coating for fabrication of ultra-thin chips (2020)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2019.111157

Publication URI: http://dx.doi.org/10.1016/j.mee.2019.111157

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering