Ultrasonic Inspection and Self-Healing of Ge and 3C-SiC Semiconductor Membranes (2020)
Attributed to:
On-Chip milliKelvin Electronic Refrigerator for Astronomical and Quantum Device Applications
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2020.2981909
Publication URI: http://dx.doi.org/10.1109/jmems.2020.2981909
Type: Journal Article/Review
Parent Publication: Journal of Microelectromechanical Systems
Issue: 3