Ultrasonic Inspection and Self-Healing of Ge and 3C-SiC Semiconductor Membranes (2020)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/JMEMS.2020.2981909

Publication URI: http://dx.doi.org/10.1109/JMEMS.2020.2981909

Type: Journal Article/Review

Parent Publication: Journal of Microelectromechanical Systems

Issue: 3