Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators (2018)
Attributed to:
Innovation and Knowledge Centre for Smart Infrastructure and Construction - Collaborative Programme Tranche 1
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1007/s00542-018-4118-5
Publication URI: http://dx.doi.org/10.1007/s00542-018-4118-5
Type: Journal Article/Review
Parent Publication: Microsystem Technologies
Issue: 3